P-170 AUTOMATED STYLUS PROFILER

Trade Agreement: CETA / WTO-AGP / NAFTA / CFTA / FTAs with Peru / Colombia / Panama / Korea Tendering Procedures: Generally only one firm has been invited to bid Non-Competitive Procurement Strategy: Interchangeable Parts Comprehensive Land Claim Agreement: No Vendor Name and Address: Julian St Martin Can-Vac Technologies 755 Bayview Drive Woodlawn Ontario Canada K0A3M0 Nature of Requirements:

31184-179227 P-170 AUTOMATED STYLUS PROFILER

1.Advance Contract Award Notice (ACAN)

An ACAN is a public notice indicating to the supplier community that a department or agency intends to award a contract for goods, services or construction to a pre-identified supplier, thereby allowing other suppliers to signal their interest in bidding, by submitting a statement of capabilities. If no supplier submits a statement of capabilities that meets the requirements set out in the ACAN, on or before the closing date stated in the ACAN, the contracting officer may then proceed with the award to the pre-identified supplier.

2.Definition of the requirement

The National Research Council Canada has a requirement for one (1) P-170 Automated Stylus Profiler for a delivery to Ottawa, Ontario. The delivery is required by March 30th 2018.

3.Criteria for assessment of the Statement of Capabilities

Any interested supplier must demonstrate by way of a statement of capabilities that its product/equipment/system meets the following requirements:

NRC Requirement for a P-170 Automated Stylus Profiler

Wafer handling

- Handling unit capable of 75mm, 100mm, 125mm and 150mm wafer support - Wafer chuck capable of 75mm, 100mm, 125mm and 150mm wafer support - Auto aligner with capability to align wafers with flats as well as notches - Aligner capable of handling of Si, InP, GaAs, GaN, without any need for change over or recalibration - Cassette loading with robotic handling and auto loading - Greater than 15 wafers per hour throughput

Performance

- 2D and 3D thin fil stress analyzer - Defect review characterization - Field of view capability down to 650µm - 200mm scan length without stitching - Step height repeatability of 4A one sigma for samples up to 1µm in height - Dynamic force control - Offline capability for: o Recipe creation o Data reporting o Data analysis - Direct interchangeability of customer specific locked process recipes with existing Tencor P10 and P17 tools

Logistics

- Vibration isolation table - Semi spec compliance (S2-0703 - GEM/SECS interface compatibility - Inclusion of both thin and thick VLSI standards ranging from 1.8µm to 250µm - 150mm and 200mm calibration wafers - 40nm to 50µm radius replacement stylus with 30 to 60 degree tip angle - Point and click operation - Top and side view optics - Motorized theta and leveling stage

4. Applicability of the trade agreement(s) to the procurement

This procurement is subject to the following trade agreement(s)

- Canadian Free Trade Agreement (CFTA) - North American Free Trade Agreement (NAFTA) - Canada-European Union Comprehensive Economic and Trade Agreement (CETA) - World Trade Organization - Agreement on Government Procurement (WTO-AGP)

5.Justification for the Pre-Identified Supplier

The only known supplier of P-170 Automated Stylus Profiler meeting all the above required technical specifications is CAN-VAC Technologies. For this reason, it is proposed to negotiate this requirement with CAN-VAC Technologies.

6.Exclusions and/or Limited Tendering Reasons

The following exclusion(s) and/or limited tendering reasons are invoked under the

Canadian Free Trade Agreement (CFTA) - Article 513 12(b) North American Free Trade Agreement (NAFTA) - Article 1016.2(b) World Trade Organization - Agreement on Government Procurement (WTO-AGP) (WTO-AGP) - Article(s) XV (1b)

7.Period of the proposed contract or delivery date

The final delivery of the equipment must be on March 30th 2018.

8.Name and address of the pre-identified supplier

CAN-VAC Technologies 1266 Bayview Drive Ottawa, Ontario Canada K0A 3M0

9.Suppliers' right to submit a statement of capabilities

Suppliers who consider themselves fully qualified and available to provide the goods, services or construction services described in the ACAN may submit a statement of capabilities in writing to the contact person identified in this notice on or before the closing date of this notice. The statement of capabilities must clearly demonstrate how the supplier meets the advertised requirements.

10.Closing date for a submission of a statement of capabilities

The closing date and time for accepting statements of capabilities is November 27th, 2017 at 2:00 p.m. EST.

11.Inquiries and submission of statements of capabilities

Inquiries and statements of capabilities are to be directed to

Gauthier, Martin Telephone No. - (613) 404-8642 Fax No. - (819) 956-3814 Delivery Date: Above-mentioned

You are hereby notified that the government intends to negotiate with one firm only as identified above. Should you have any questions concerning this requirement, contact the contracting officer identified above.

An Advance Contract Award Notice (ACAN) allows departments and agencies to post a notice, for no less than fifteen (15) calendar days, indicating to the supplier community that it intends to award a good, service or construction contract to a pre-identified contractor. If no other supplier submits, on or before the closing date, a Statement of Capabilities that meets the requirements set out in the ACAN, the contracting authority may then proceed with the award. However, should a Statement of Capabilities be found to meet the requirements set out in the ACAN, then the contracting authority will proceed to a full tendering process.

Suppliers who consider themselves fully qualified and available to provide the services/goods described herein, may submit a statement of capabilities in writing to the contact person identified in this Notice on or before the closing date of this Notice. The statement of capabilities must clearly demonstrate how the supplier meets the advertised requirements.

The PWGSC file number, the contracting officer's name and the closing date of the ACAN must appear on the outside of the envelope in block letters or, in the case of a facsimile transmission, on the covering page.

The Crown retains the right to negotiate with suppliers on any procurement.

Documents may be submitted in either official language of Canada.